Wafer Manufacturing (OHT Applications)
Environmental Perception Sensors

LiDAR: Installed at both the upper and lower front sections of the Overhead Hoist Transport vehicle. Capable of detecting foreign objects as small as 0.5mm in diameter (e.g., fallen screws) at a distance over 10 meters, with a ranging accuracy of ±2mm. Provides real-time obstacle data for path planning.

Vision Camera + AI Recognition: High-speed industrial cameras paired with deep learning algorithms enable precise identification of track markings and the Load Port positions of tools, achieving a positioning error of ≤0.1mm. This system maintains stable recognition even under varying cleanroom lighting conditions.

Wireless Communication Sensor: Equipped on OHT vehicles, these sensors operate independently of WiFi networks. They allow OHTs to form localized mesh networks within a certain range, facilitating highly efficient and secure local decision-making.

Typical products:
Lidars and 3D Cameras

During overhead transport, vehicles operate in fleets, placing extremely high demands on operational stability.

Multi-Stage Protection as a Primary Requirement:
The wafer handling process requires high efficiency (speed). When a stop is necessary, the standard three-stage protection of OLEI’s existing LiDAR results in excessively high deceleration, which can cause excessive impact on wafers and lead to deformation issues. Multi-stage protection allows for significantly lower deceleration, thereby maximizing transport safety.

Black Non-Detection Mode:
During wafer transport, pillars are inevitably present in the tack. During operation, the Lidar can easily detect these pillars. By wrapping them with black, low-reflectivity materials, the Lidar can be configured to ignore them.

Therefore, the Lidar operates in two modes: Standard Mode and Black Non-Detection Mode.